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Onto Innovation Inc Patents
What Onto Innovation Inc has filed at the patent office — applications as well as grants, because a filing is on the record eighteen months before anyone has to say what it was for.
ONTO on carbonthat →Filings on file
50
Granted
2
Still pending
48
Filed under
3 names
50 filings
Newest filing first. A pending application has no patent number yet, and most never get one.
| Invention | Patent |
|---|---|
| METHOD AND SYSTEM FOR INSPECTION OF DEFECTS IN SEMICONDUCTOR FABRICATIONFiled as ONTO INNOVATION INC.2026-01-08MANJUN LEE | pending |
| METHOD AND SYSTEM FOR DETECTION OF BEVEL EDGEFiled as ONTO INNOVATION INC.2025-12-23ROBERT DAVIS | pending |
| METHOD AND SYSTEM FOR AUTOMATED FEATURE INSPECTION AND ALIGNMENT IN SEMICONDUCTOR FABRICATIONFiled as ONTO INNOVATION INC.2025-12-22JIAN DING | pending |
| METHOD FOR IMPROVING THROUGHPUT OF PACKAGING LITHOGRAPHY AT LOWER RESOLUTIONSFiled as ONTO INNOVATION INC.2025-12-22KEITH F. BEST | pending |
| SYSTEM AND METHOD FOR SUPPRESSION OF BACKGROUND SIGNAL IN TIME RESOLVED METROLOGY SIGNALSG03F 7/706849, G01N 21/9501, G03F 7/706851, G03F 7/706847, G01N 21/1717, G01N 21/636, G01N 21/95, G01N 21/9505, G01N2021/1706, G01N2021/1725, G01N2021/8438, G03F 7/70625Filed as Onto Innovation Inc.2025-12-18Robin A. Mair | pending |
| METROLOGY DEVICE NORMALIZATION CHANNELFiled as ONTO INNOVATION INC.2025-12-15TUWIN LAM | pending |
| SIMULTANEOUS MULTI-WAVELENGTH AND MULTI-ANGLE ELLIPSOMETRYFiled as ONTO INNOVATION INC.2025-12-15ALEX RUDER | pending |
| TWO-AXIS-MOTION FROM A LINEAR ACTUATORH02K 41/031, H02K 41/0354, H10P 72/7624, B25J 9/123, G03F 7/70758, H02K 41/0356, H02K2201/18Filed as Onto Innovation Inc.2025-12-12Stephen W. Into | pending |
| DEVICE ALIGNMENT FOR CORRECTING SUBSTRATE ANGLEFiled as ONTO INNOVATION INC.2025-12-09STEPHEN W. INTO | pending |
| DEVICE ALIGNMENT FOR CORRECTING SUBSTRATE ANGLEG01B 11/272, G03F 9/7011, H10P 72/53, G03F 7/7075, G03F 9/7015, G03F 9/7049, G03F 9/7088, G03F 9/7092, G06T 7/001Filed as Onto Innovation Inc.2025-12-05Stephen W. Into | pending |
| FOCUS TRACKING TECHNIQUES FOR INSPECTION SYSTEMFiled as ONTO INNOVATION INC.2025-12-05NOAH CHRISTOPHER BOCK | pending |
| FABRICATION FINGERPRINT FOR PROACTIVE YIELD MANAGEMENTG05B 19/41875, G05B2219/32368, G05B2219/45031Filed as Onto Innovation Inc.2025-11-13Prasad Bachiraju | pending |
| RAPID ELLIPSOMETRY USING ENCODED ANGULAR DISTRIBUTION OF LIGHTFiled as ONTO INNOVATION INC.2025-09-19MATTHEW SARTIN | pending |
| SURFACE INSPECTION USING LASER TRIANGULATIONFiled as ONTO INNOVATION INC.2025-09-10JIAN DING | pending |
| TOP PLATE FOR INSPECTION SYSTEMFiled as ONTO INNOVATION INC.2025-09-09STEPHEN W. INTO | pending |
| TOP PLATE FOR INSPECTION SYSTEMG01N 21/8806, G01N 21/9501, G01N2201/021Filed as Onto Innovation Inc.2025-08-11Stephen W. Into | pending |
| TRANSIENT ELLIPSOMETRY WITH ASYNCHRONOUS OPTICAL SAMPLINGFiled as ONTO INNOVATION INC.2025-06-30GEORGE ANDREW ANTONELLI | pending |
| POLARIZATION INTERFEROMETERG01B 11/30, G01B 9/02007, G01B 9/02027, G01B 9/02087, G01B2290/70Filed as Onto Innovation Inc.2025-06-25Bradley Kimbrough | pending |
| INSPECTION METHOD AND SYSTEM FOR INTEGRATED CIRCUIT SUBSTRATESH10P 74/203, H10P 72/78, H10P 72/0604, H10P 72/0418, H10P 74/207, H10P 72/06, H10P 72/53, H10P 74/238Filed as Onto Innovation Inc.2025-05-20Keith F. Best | pending |
| WIDE BANDGAP SEMICONDUCTOR CHARACTERIZATION BASED ON CAPACITANCE CHARACTERISTICS ACQUIRED USING CORONA SURFACE CHARGE NEUTRALIZATION BY UV RADIATION PULSESG01R 31/2648, H10P 74/23, H10P 74/207, G01R 1/071, G01R 31/2601, G01R 31/2656, G01R 31/302Filed as Onto Innovation SDI LLC2025-05-12Marshall D. Wilson | 12650458 |
| METROLOGY TO REDUCE OVERLAY ERRORFiled as ONTO INNOVATION INC.2025-05-06KEITH F. BEST | pending |
| ON-THE-FLY OPTO-ACOUSTIC MICROSCOPYFiled as ONTO INNOVATION INC.2025-04-03FRANK VOZZO | pending |
| OPTO-ACOUSTIC MICROSCOPY USING AN INSTANTANEOUS SIGNAL DIFFERENCE BETWEEN SIGNALS FROM TWO DISCRETE DELAY TIMES ACQUIRED WITH A SINGLE PROBE BEAMFiled as ONTO INNOVATION INC.2025-04-03ROBIN A. MAIR | pending |
| METROLOGY BASED ON TIME RESOLVED NON-ACOUSTIC SIGNALSFiled as ONTO INNOVATION INC.2025-03-27JULIEN MICHELON | pending |
| FRONT-TO-BACK OVERLAY (FTBO) STANDARDFiled as ONTO INNOVATION INC.2025-03-18KEITH F. BEST | pending |
| VARIABLE WAVELENGTH INTERFEROMETRYFiled as ONTO INNOVATION INC.2025-03-06ALEXANDER GEORGE BOOSALIS | pending |
| VARIABLE WAVELENGTH INTERFEROMETRYH04N 23/71, G01N 21/45, H04N 23/74, H04N 23/90, G01N 21/21Filed as Onto Innovation Inc.2025-03-05Alexander George BOOSALIS | pending |
| SURFACE INSPECTION SYSTEMFiled as ONTO INNOVATION INC.2025-02-20JIAN DING | pending |
| FIDUCIAL PATTERN ALIGNMENT TECHNIQUESFiled as ONTO INNOVATION INC.2025-02-12JOHN M. THORNELL | pending |
| FIDUCIAL PATTERN ALIGNMENT TECHNIQUESG03F 9/7049, G03F 9/7092, G03F 9/7076, G03F 9/708, G03F 9/7088Filed as Onto Innovation Inc.2025-01-31John M. Thornell | pending |
| METHOD AND SYSTEM FOR INSPECTION OF DEFECTS IN SEMICONDUCTOR FABRICATIONFiled as Onto Innovation Inc.2025-01-10ManJun Lee | pending |
| AUTOMATED SUBSTRATE DEFECT IDENTIFICATION USING MULTIPLE CLASSIFICATION ENGINE MODELSG06V 10/774, G06T 7/0004, G06V 10/7715, G06V2201/06, G06V 10/82, G06V 10/993, G06V 10/764, G06T2207/20081, G06T2207/20084, G06T2207/30148Filed as Onto Innovation Inc.2024-12-31Longjiang Xiang | pending |
| METHOD FOR IMPROVING THROUGHPUT OF PACKAGING LITHOGRAPHY AT LOWER RESOLUTIONSG03F 7/7045, G03F 7/70475, G03F 7/70291, G03F 7/70383, G03F 7/70433, G03F 7/70508, H01J 37/3174Filed as Onto Innovation Inc.2024-12-30Keith F. Best | pending |
| METHOD AND SYSTEM FOR DETECTION OF BEVEL EDGEG06T 7/13, G01N 21/9503, G06T 7/50, G01N 21/8851, G01N2021/8877, G01N2021/8887, G06T 7/0004, G06T 7/0006, G06T2207/20024, G06T2207/20061, G06T2207/20081, G06T2207/30148Filed as Onto Innovation Inc.2024-12-30Robert Davis | pending |
| METHOD AND SYSTEM FOR AUTOMATED FEATURE INSPECTION AND ALIGNMENT IN SEMICONDUCTOR FABRICATIONG01N 21/6402, G01N 21/6445, H10P 74/203, H10P 72/0616, G01N 21/21, G01N2201/06113, G01N2201/0683Filed as Onto Innovation Inc.2024-12-24Jian Ding | pending |
| FOCUS TRACKING TECHNIQUES FOR INSPECTION SYSTEMG01N 21/8806, G01N 21/9501, G01N2201/0636, G01N2201/0638, G01N2201/1087, G01N2201/11Filed as Onto Innovation Inc.2024-12-20Noah Christopher Bock | pending |
| SIMULTANEOUS MULTI-WAVELENGTH AND MULTI-ANGLE ELLIPSOMETRYG01N 21/211, G01N2021/214, G01N2201/06113, G01N2201/062, G01N2201/0636Filed as Onto Innovation Inc.2024-12-20Alex RUDER | pending |
| METROLOGY DEVICE NORMALIZATION CHANNELG03F 7/706845, G01N 21/95, G03F 7/706847, H10P 74/20, G01B 11/02, G01B 11/06, G01B 11/0625, G01B 11/24, G01B 11/26, G01J 3/28, G01J 3/42, G01J 3/447, G01J2003/425, G01N 21/21, G01N 21/211, G01N 21/25, G01N 21/9501, G01N2021/213Filed as Onto Innovation Inc.2024-12-20Tuwin LAM | pending |
| ON-THE-FLY OPTO-ACOUSTIC MICROSCOPYG01N 21/9505, G01N 29/275, G01N 21/1702, G01N 29/0681, G01N 29/2418, G01N 29/343, G01N2021/1706, G01N2291/023, G01N2291/2697, G01S 15/8968Filed as Onto Innovation Inc.2024-12-18Frank Vozzo | pending |
| OPTO-ACOUSTIC MICROSCOPY USING AN INSTANTANEOUS SIGNAL DIFFERENCE BETWEEN SIGNALS FROM TWO DISCRETE DELAY TIMES ACQUIRED WITH A SINGLE PROBE BEAMG01N 21/9505, G01N 29/275, G01N 21/1702, G01N 29/0681, G01N 29/2418, G01N 29/343, G01N2021/1706, G01N2291/023, G01N2291/2697, G01S 15/8968Filed as Onto Innovation Inc.2024-12-18Robin A. Mair | pending |
| METROLOGY BASED ON TIME RESOLVED NON-ACOUSTIC SIGNALSG01N 21/9505, G01N 29/275, G01N 21/1702, G01N 29/0681, G01N 29/2418, G01N 29/343, G01N2021/1706, G01N2291/023, G01N2291/2697, G01S 15/8968Filed as Onto Innovation Inc.2024-12-18Julien Michelon | pending |
| METROLOGY DEVICE WITH WAVELENGTH-FREQUENCY MULTIPLEXINGFiled as ONTO INNOVATION INC.2024-12-16ALEXANDER GEORGE BOOSALIS | pending |
| SURFACE INSPECTION USING LASER TRIANGULATIONG01B 11/0608, G01N 21/8851, G01N2021/8461, G01N2021/8854, G01N2201/06113Filed as Onto Innovation Inc.2024-11-20Jian Ding | pending |
| MULTI-SIZED SUBSTRATE FIXTUREH10P 72/7624, H10P 72/7608, H10P 72/7602, H10P 72/7606, B25J 15/0033, B25J 15/0052Filed as Onto Innovation Inc.2024-11-14Troy Palm | pending |
| RAPID ELLIPSOMETRY USING ENCODED ANGULAR DISTRIBUTION OF LIGHTG01N 21/211, G02B 26/0833, G01N 21/01, G01N2021/0125, G01N2021/214, G02B 3/00, G02B 27/28, G02B2003/0093Filed as Onto Innovation Inc.2024-10-21Matthew SARTIN | pending |
| SIMULTANEOUS CONFOCAL AND NON-CONFOCAL RAMAN SPECTROSCOPYG01N 21/65, G01N2201/0833, G02B 6/03633Filed as Onto Innovation Inc.2024-10-04Lei Tao | pending |
| SYSTEM AND METHOD FOR PERFORMING CHARACTERIZATION OF A SAMPLEG01R 33/0325, G01R 33/12, G01R 1/07, G01R 1/071, G01R 31/308, G01R 31/311, H01S 3/0057Filed as Onto Innovation Inc.2024-09-26Manjusha Mehendale | 12710490 |
| SYSTEM AND METHOD FOR PERFORMING CHARACTERIZATION OF A SAMPLE USING MULTI-WAVELENGTH LASER ACOUSTICSG01N 21/63, G01N 21/31, G01N 29/04, G01N 29/2418Filed as Onto Innovation Inc.2024-09-26Manjusha Mehendale | pending |
| SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKSG06V 10/82, H10P 72/0608, B25J 9/1697, G06T 7/0004, G06V 10/141, G06V2201/06, G06V 10/32, G06V 10/764, G06F 18/24, H10P 72/3404, H10P 72/3402, G01N 21/9501, G01N2021/8883, G06T2207/10024, G06T2207/20081, G06T2207/20084, G06T2207/30148Filed as Onto Innovation Inc.2024-09-24Jason Paul Remillard | pending |
| BLUR REDUCTION TECHNIQUES FOR SEMICONDUCTOR INSPECTIONFiled as ONTO INNOVATION INC.2024-09-19JIAN DING | pending |
Filings are matched to the company by applicant name, so a subsidiary filing under its own name is only here if that name resolves to this company. The applicant is printed as filed, which makes a wrong match visible. A patent is not a product: most applications are never granted, and most grants are never built.
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