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Entegris Inc Patents
What Entegris Inc has filed at the patent office — applications as well as grants, because a filing is on the record eighteen months before anyone has to say what it was for.
ENTG on carbonthat →Filings on file
65
Granted
0
Still pending
65
Filed under
2 names
65 filings
Newest filing first. A pending application has no patent number yet, and most never get one.
| Invention | Patent |
|---|---|
| METHOD FOR ETCHING POLYSILICONC09K 13/00, C09K 13/06, H10P 50/642, H10P 50/667Filed as ENTEGRIS, INC.2026-06-04Steven M. Bilodeau | pending |
| OXYHALIDE PRECURSORSC01G 39/02, C01G 39/04, C23C 16/08, C01B 11/00, C01G 39/00, C01G 41/00, C01G 41/04, C01P2002/72, C01P2002/74, C01P2002/76, C01P2002/77, C01P2002/78, C01P2002/82, C01P2002/88, C01P2004/38, C23C 16/10, C23C 16/14Filed as ENTEGRIS, INC.2026-06-03David M. Ermert | pending |
| FUNCTIONALIZED ORGANOTIN PRECURSORS AND RELATED METHODSC07F 7/2284, C23C 16/407, C23C 16/45553Filed as ENTEGRIS, INC.2026-05-28David M. Ermert | pending |
| TIN(II) AMIDE/ALKOXIDE PRECURSORS FOR EUV-PATTERNABLE FILMSG03F 7/0042, C07F 7/2224, C07F 7/2284, G03F 7/0043, G03F 7/2004Filed as ENTEGRIS, INC.2026-05-15David M. Ermert | pending |
| SILICON NITRIDE ETCHING COMPOSITION AND METHODC09K 13/06, H10P 50/683, H10P 50/282, H10P 14/3216, H10P 50/642, H10P 50/28, H10P 50/283, H10P 50/667, C09K 13/00, C09K 13/04, C09K 13/08, C23F 1/14Filed as ENTEGRIS, INC.2026-05-13Steven Michael Bilodeau | pending |
| RETICLE CONTAINER WITH DIRECTED PURGE FLOWG03F 1/66, H10P 72/1926, H10P 72/1906, H10P 72/1902Filed as ENTEGRIS, INC.2026-05-08Russ V. Raschke | pending |
| SYSTEM AND METHOD FOR FLOW-THROUGH ATOMIC LAYER DEPOSITION ON SEMICONDUCTOR PROCESSING TOOL COMPONENTSFiled as ENTEGRIS, INC.2026-03-27CARLO WALDFRIED | pending |
| SYSTEM AND METHOD FOR FLOW-THROUGH ATOMIC LAYER DEPOSITION ON SEMICONDUCTOR PROCESSING TOOL COMPONENTSC23C 16/45561, C23C 16/4404, C23C 16/45553Filed as Entegris, Inc.2026-03-27Carlo Waldfried | pending |
| CHARGED POROUS MEMBRANESFiled as ENTEGRIS, INC.2026-03-25AABID ALI MIR | pending |
| ALUMINUM PRECURSORS FOR DEPOSITION PROCESSES AND RELATED SYSTEMS AND RELATED METHODSFiled as ENTEGRIS, INC.2026-03-24DREW MICHAEL HOOD | pending |
| COMPOUNDS AND PROCESSES FOR EXTREME ULTRAVIOLET LITHOGRAPHYC07F 7/2284, C07F 17/00, C07F 7/2224Filed as ENTEGRIS, INC.2026-03-20David M. Ermert | pending |
| SORBENT MATERIALS FOR GAS STORAGEFiled as ENTEGRIS, INC.2026-03-18ALEMAYEHU HAILU BEDANE | pending |
| SORBENT MATERIALS FOR GAS STORAGEB01J 20/20, C01B 32/318, C01B 32/336, B01J 20/28011, B01J 20/28042, B01J 20/28066, B01J 20/28088, B01J 20/3078, B01J 20/3416, B01J 20/3483, B01J 20/3491, C01P2006/12, C01P2006/17, F17C 11/00Filed as Entegris, Inc.2026-03-18Alemayehu Hailu Bedane | pending |
| METHODS FOR QUANTIFYING PRECURSOR COMPOUNDS AND RELATED SYSTEMS AND RELATED COMPOSITIONSG01N 24/088Filed as ENTEGRIS, INC.2026-03-18Drew Michael Hood | pending |
| METHODS FOR QUANTIFYING PRECURSOR COMPOUNDS AND RELATED SYSTEMS AND RELATED COMPOSITIONSFiled as ENTEGRIS, INC.2026-03-18DREW MICHAEL HOOD | pending |
| CHEMICAL-MECHANICAL POLISHING COMPOSITION CONTAINING SILICA AND CERIA ABRASIVESC09K 3/1463, H10P 52/402, H10P 52/407Filed as ENTEGRIS, INC.2026-03-16Elliot Knapton | pending |
| CHEMICAL-MECHANICAL POLISHING COMPOSITION CONTAINING SILICA AND CERIA ABRASIVESFiled as ENTEGRIS, INC.2026-03-16ELLIOT KNAPTON | pending |
| SILICON NITRIDE ETCHING COMPOSITIONS AND METHODC09K 13/04, C09K 13/06, H10P 50/683, H10P 14/6309, H10P 50/282, H10P 50/642, H10P 50/283, H10P 50/667, H10P 95/70, C09K 13/00, C09K 13/08Filed as ENTEGRIS, INC.2026-03-12Steven M. Bilodeau | pending |
| ALUMINUM-DOPED SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF CARBON-BASED FILMSC09G 1/02, H10P 52/407, H10P 95/062, B24B 37/044, C09K 3/1409, C09K 3/1436, C09K 3/1463Filed as ENTEGRIS, INC.2026-03-06Brian Reiss | pending |
| ALUMINUM-DOPED SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF CARBON-BASED FILMSFiled as ENTEGRIS, INC.2026-03-06BRIAN REISS | pending |
| MULTI-RETICLE CARRIER USEFUL WITH RETICLES OF DIFFERENT DIMENSIONS, AND RELATED METHODSFiled as ENTEGRIS, INC.2026-03-06TYLER MONFORTON | pending |
| COMPOSITIONS FOR UNIFORM ETCHING OF HIGH ASPECT RATIO STRUCTURESC23F 1/26Filed as ENTEGRIS, INC.2026-03-05Chia-Jung Hsu | pending |
| VACUUM LOAD PORTS, VACUUM-COMPATIBLE DOORS, AND METHODS FOR TRANSFERRING A RETICLE PODG03F 7/70741, H10P 72/1914, H10P 72/1926, H10P 72/3406, H10P 72/1906, H10P 72/1916, H10P 72/1902, G03F 7/7075, G03F 7/70841, G03F 7/7095Filed as ENTEGRIS, INC.2026-03-05Tyler Monforton | pending |
| COMPOSITIONS FOR UNIFORM ETCHING OF HIGH ASPECT RATIO STRUCTURESFiled as ENTEGRIS, INC.2026-03-05CHIA-JUNG HSU | pending |
| PURIFICATION SYSTEMS AND METHODS FOR REMOVING CONTAMINANTS FROM A NEON GAS MIXTUREFiled as ENTEGRIS, INC.2026-02-27SARAH VOGT | pending |
| PRECURSORS AND METHODS FOR DEPOSITING METAL-CONTAINING FILMSC23C 16/14, C09K 13/00, C23C 16/45553Filed as ENTEGRIS, INC.2026-02-26Claudia Fafard | pending |
| PRECURSORS AND METHODS FOR DEPOSITING METAL-CONTAINING FILMSFiled as ENTEGRIS, INC.2026-02-26CLAUDIA FAFARD | pending |
| SOLVENT-BASED COMPOSITIONS FOR POST-ETCH RESIDUE REMOVAL AND RELATED METHODSC11D 7/3281, C11D 7/5013, C11D2111/22, C11D 7/08, C11D 7/10, C11D 7/30, C11D 7/3209, C11D 7/34Filed as ENTEGRIS, INC.2026-02-20Chia-Jung Hsu | pending |
| REMOTE OPTIMIZATION OF PURGE FLOW RATES IN A CONTAINERH10P 72/0604, H10P 72/1924, H10P 72/1926, H10P 72/3404, H10P 72/3408, H10P 72/14, H10P 72/1906Filed as ENTEGRIS, INC.2026-02-20Matthew A. Fuller | pending |
| SOLVENT-BASED COMPOSITIONS FOR POST-ETCH RESIDUE REMOVAL AND RELATED METHODSFiled as ENTEGRIS, INC.2026-02-20CHIA-JUNG HSU | pending |
| ETCHANT PRETREATMENT SOLUTIONS AND RELATED METHODSFiled as ENTEGRIS, INC.2026-02-19QIHUI QIAN | pending |
| ETCHANT PRETREATMENT SOLUTIONS AND RELATED METHODSC09D 183/06, C09D 7/65, C09D 183/08Filed as ENTEGRIS, INC.2026-02-19Qihui Qian | pending |
| ADAPTABLE CONTAINER DOOR RETAINERFiled as ENTEGRIS, INC.2026-02-17CHRISTOPHER STRICKHOUSER | pending |
| FILTER MODULEH10P 72/1926, B01D 46/645, H10P 72/1912, H10P 72/1916, H10P 72/1922, B01D 46/0005, B01D 46/10, F16K 15/06, F16K 27/0209Filed as ENTEGRIS, INC.2026-02-12Matthew A. Fuller | pending |
| POROUS MEMBRANES THAT CONTAIN POLYDOPAMINE, FILTERS, AND METHODS OF USE IN FILTERING AN AQUEOUS SLURRYFiled as ENTEGRIS, INC.2026-02-11YU-HENG CHENG | pending |
| RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALLH10P 72/1902, G03F 1/66, G03F 7/20, H10P 72/1912, H10P 72/1906Filed as ENTEGRIS, INC.2026-02-10Russ V. Raschke | pending |
| BACKSTOP ATTACHMENT STRUCTURE FOR A PROCESS CARRIERFiled as ENTEGRIS, INC.2026-02-09CHRISTOPHER STRICKHOUSER | pending |
| CALIBRATION APPARATUS FOR AMC MEASUREMENT EQUIPMENT AND METHODS FOR CALIBRATING THE SAMEFiled as ENTEGRIS, INC.2026-02-06FANGHUANG TU | pending |
| SEMICONDUCTOR SUBSTRATE CARRYING CONTAINER WITH SUPPORT WALL FORMED WITH CORRUGATION PORTIONSH10P 72/15, H10P 72/1912, H10P 72/7614, H10P 72/14, H10P 72/7624, H10P 72/1921Filed as ENTEGRIS, INC.2026-02-06Jack Dunlope | pending |
| SYSTEMS FOR CONTROLLED PRECURSOR DELIVERY TO A PLURALITY OF DEPOSITION CHAMBERS AND RELATED METHODSFiled as ENTEGRIS, INC.2026-01-23BRYAN C. HENDRIX | pending |
| SYSTEMS FOR CONTROLLED PRECURSOR DELIVERY TO A PLURALITY OF DEPOSITION CHAMBERS AND RELATED METHODSC23C 16/45561, C23C 16/52, C23C 16/4481, C23C 16/45544Filed as ENTEGRIS, INC.2026-01-23Bryan C. Hendrix | pending |
| HIGH PURITY PRECURSOR COMPOSITIONS AND RELATED METHODSC07F 11/00, C23C 16/34Filed as ENTEGRIS, INC.2026-01-22David Kuiper | pending |
| HIGH PURITY PRECURSOR COMPOSITIONS AND RELATED METHODSFiled as ENTEGRIS, INC.2026-01-22DAVID KUIPER | pending |
| METHOD OF MANUFACTURING MAGNESIUM INDIUM OXIDE THIN FILMSFiled as ENTEGRIS, INC.2026-01-20SUNGHAE LEE | pending |
| FILTER CARTRIDGE, AND METHOD OF RETROFITTING FILTER HOUSINGB01D 29/35, B01D 29/96, B01D 35/153, B01D 29/111, B01D 29/114, B01D 29/66, B01D 35/30, B01D2201/167, B01D2201/302, B01D2201/303, B01D2201/305, B01D2201/4084, B01D2201/4092Filed as ENTEGRIS, INC.2026-01-07Jeffrey J. McKenzie | pending |
| VESSELS AND METHODS FOR STORING AND DELIVERY A REAGENTB65D 81/20, F17C 1/00, F17C 3/00, F17C 13/04, B65D 25/38, B65D 47/24, B65D 90/00, B65D 90/22, B65D 90/54, F17C 11/00, F17C 13/00, F17C 13/021, F17C2201/0109, F17C2201/0119, F17C2201/032, F17C2201/035, F17C2201/037, F17C2201/058, F17C2203/0391, F17C2203/0617, F17C2203/0629, F17C2205/0323, F17C2205/0329, F17C2205/0335, F17C2223/0153, F17C2223/033, F17C2223/045, F17C2270/0518Filed as ENTEGRIS, INC.2025-12-23Oleg Byl | pending |
| CASSETTE HOLD DOWN WITH CONTACT ARMSFiled as ENTEGRIS, INC.2025-12-19HANG KHIM TAN | pending |
| CASSETTE HOLD DOWN WITH CONTACT ARMSH10P 72/1912, H10P 72/1914, H10P 72/1921, H10P 72/1922, H10P 72/1918Filed as ENTEGRIS, INC.2025-12-19Hang Khim Tan | pending |
| CHEMICAL-MECHANICAL PLANARIZATION PADS AND METHODSB24B 37/24, B24B 37/26, B24B 37/22, C08G 18/48, C08L 75/04, C09G 1/02Filed as ENTEGRIS, INC.2025-12-16Paul Andre Lefevre | pending |
| CHEMICAL-MECHANICAL PLANARIZATION PADS AND METHODSFiled as ENTEGRIS, INC.2025-12-16PAUL ANDRE LEFEVRE | pending |
| CONNECTION ASSEMBLY AND FILTER ASSEMBLYFiled as ENTEGRIS, INC.2025-12-12JUNYA TAKAHASHI | pending |
| BISMUTH PRECURSORS FOR EUV FILM PROCESSESC07F 9/94Filed as ENTEGRIS, INC.2025-12-09David M. Ermert | pending |
| BISMUTH PRECURSORS FOR EUV FILM PROCESSESFiled as ENTEGRIS, INC.2025-12-09DAVID M. ERMERT | pending |
| BISMUTH FILMS TARGETING EUV PHOTOLITHOGRAPHY APPLICATIONSFiled as ENTEGRIS, INC.2025-12-09DAVID M. ERMERT | pending |
| BISMUTH FILMS TARGETING EUV PHOTOLITHOGRAPHY APPLICATIONSG03F 7/0043, G03F 7/167, G03F 7/0042, G03F 7/11, G03F 7/168, G03F 7/2004, G03F 7/322, G03F 7/325, G03F 7/36, G03F 7/38, G03F 7/70033Filed as ENTEGRIS, INC.2025-12-09David M. Ermert | pending |
| HIGH PURITY PRECURSOR COMPOSITIONS AND RELATED METHODSFiled as ENTEGRIS, INC.2025-12-04DAVID KUIPER | pending |
| HIGH PURITY PRECURSOR COMPOSITIONS AND RELATED METHODSC07F 11/00, C07F 11/005Filed as ENTEGRIS, INC.2025-12-04David Kuiper | pending |
| CONTAINERS, METHODS OF PREPARING A CONTAINER, AND METHODS OF MIXING A LIQUID SLURRY IN THE CONTAINERB01F 23/53, B01F 35/5312, B01F 35/413, B01F 27/113, B01F 27/805, B01F 27/61, B01F 23/511Filed as ENTEGRIS, INC.2025-12-04Riley Thiesfeld | pending |
| CONTAINERS, METHODS OF PREPARING A CONTAINER, AND METHODS OF MIXING A LIQUID SLURRY IN THE CONTAINERFiled as ENTEGRIS, INC.2025-12-04RILEY THIESFELD | pending |
| COLORLESS, PARTICLE-FREE, AMINOSILANE-CONTAINING WET ETCH FORMULATIONSFiled as ENTEGRIS, INC.2025-12-03CLAUDIA YEVENES | pending |
| COLORLESS, PARTICLE-FREE, AMINOSILANE-CONTAINING WET ETCH FORMULATIONSC09K 13/06, C09K 13/08, H10P 50/283Filed as ENTEGRIS, INC.2025-12-03Claudia Yevenes | pending |
| PAD FOR CHEMICAL-MECHANICAL POLISHINGB24B 37/042, B24B 37/26, B24B 37/24Filed as ENTEGRIS, INC.2025-11-24Colin Blake | pending |
| PAD FOR CHEMICAL-MECHANICAL POLISHINGFiled as ENTEGRIS, INC.2025-11-24COLIN BLAKE | pending |
| CERIA BASED COMPOSITIONS AND METHODS FOR HARD CARBON POLISHINGC09G 1/02, H10P 52/403, H10P 52/407, H10P 95/062, B24B 37/044, C09K 3/1409, C09K 3/1463Filed as ENTEGRIS, INC.2025-11-22Alex Villani-Gale | pending |
| CERIA BASED COMPOSITIONS AND METHODS FOR HARD CARBON POLISHINGFiled as ENTEGRIS, INC.2025-11-22ALEX VILLANI-GALE | pending |
Filings are matched to the company by applicant name, so a subsidiary filing under its own name is only here if that name resolves to this company. The applicant is printed as filed, which makes a wrong match visible. A patent is not a product: most applications are never granted, and most grants are never built.
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