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ASML Holding NV Patents
What ASML Holding NV has filed at the patent office — applications as well as grants, because a filing is on the record eighteen months before anyone has to say what it was for.
ASML on carbonthat →Filings on file
11
Granted
3
Still pending
8
Filed under
3 names
11 filings
Newest filing first. A pending application has no patent number yet, and most never get one.
| Invention | Patent |
|---|---|
| LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING METROLOGY SYSTEM AND METHODG03F 7/70625, G03F 7/706849, G03F 7/706851, G03F 7/70633, G03F 9/7049Filed as ASML HOLDING N.V.2026-02-25Sebastianus Adrianus GOORDEN | pending |
| FAST UNIFORMITY DRIFT CORRECTIONG03F 7/70075, G03F 7/70141, G03F 7/70191, G03F 7/70133, G03F 7/7015, G03F 7/7085Filed as ASML Holding N.V.2025-12-16Roberto B. WIENER | pending |
| MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION SOURCESG01M 11/35, G02B 6/4225, G03F 7/70625, H01S 3/0804, G01B 11/27, G01J 1/0425, G01J 1/4257, G01J2001/4247, G01M 11/30, G01M 11/33, G02B 1/005, G02B 6/02, G02B 6/02309, G02F 1/365, G02F2202/32, G03F 7/70525, G03F 7/70616, G03F 7/7065, H01S 3/0092Filed as ASML HOLDING N.V2025-07-23Sebastian Thomas BAUERSCHMIDT | pending |
| SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE VOLTAGE TO AN OXIDIZED WAFERG03F 7/70783, H10P 72/72, H10P 72/0616, G03F 7/70691, G03F 7/70708Filed as ASML Holding N.V.2025-07-09Tammo UITTERDIJK | pending |
| CONTAMINANT IDENTIFICATION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOFG01N 21/94, G03F 1/84, G03F 7/70916, G01N 15/1433, G01N 15/0211, G01N 15/0227, G01N 15/1434, G01N 21/171, G01N 21/4795, G01N 21/8806, G01N 21/8851, G01N2015/1438, G01N2015/144, G01N2015/1493, G01N2021/1714, G01N2021/3155, G01N2021/8845, G01N2021/8896, G01N2021/95676, G03F 7/2004, G03F 7/7085Filed as ASML Holding N.V.2025-06-18Andrew JUDGE | pending |
| SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUSG03F 7/70691, G03F 7/707, G03F 7/70716, H10P 72/7614, H10P 72/0441, H10P 72/7611, H10P 72/7616, G03F 7/70783, G03F 7/70908Filed as ASML HOLDING N.V.2025-05-16Thomas POIESZ | pending |
| SYSTEMS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUSG03F 7/70808, G03F 7/70925, B08B 1/143, B08B 7/0028, B08B 13/00, G03F 7/70733Filed as ASML HOLDING N.V.2025-02-07Daniel Paul RODAK | pending |
| APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANINGG03F 7/70691, G03F 7/70733, G03F 7/70925, H10P 72/7614, H10P 72/0406, G03F 7/707, G03F 7/70708, G03F 7/70716, G03F 7/70783Filed as ASML Holding N.V.2024-08-30Keane Michael LEVY | pending |
| METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGSG03F 7/70491, G03F 7/707, H10P 72/7614Filed as ASML Holding N.V.2024-07-15Mehmet Ali AKBAS | 12529967 |
| LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHODG03F 7/70691, G03F 7/70716, G03F 7/70825, G03F 7/70725Filed as ASML Holding N.V.2024-01-10Daniel Nathan BURBANK | 12535745 |
| METROLOGY SYSTEMS WITH PHASED ARRAYS FOR CONTAMINANT DETECTION AND MICROSCOPYG03F 7/706849, G03F 7/70908, G03F 7/706837, G03F 7/706847, G01N 21/956, G02F 1/2955, G03F 7/7065, G03F 7/70925Filed as ASML Holding N.V.2024-01-10Mohamed SWILLAM | 12631975 |
Filings are matched to the company by applicant name, so a subsidiary filing under its own name is only here if that name resolves to this company. The applicant is printed as filed, which makes a wrong match visible. A patent is not a product: most applications are never granted, and most grants are never built.